Products > Display evaluation > TFT(oxide/LTPS) > OPTM(UV SR) series
Products > Semiconductor evaluation > Metrology > OPTM(UV SR) series
Advances in technology have made the role of nanomaterials even more important. The OPTM series enable more microscopic measurement and study than conventional products. Non-destructive and non-contact testing encourages you to precisely measure coating film thickness and multilayer thin film of optical materials. Also, high-speed measurement within 1 second per point is possible. OPTM series offer you an optimum solution. Software is easy to use for beginners by making optical constant analysis simple.
High-precision absolute reflectance measurement by microscopic spectroscopy (Multilayer film thickness, optical constant)
The functions for film thickness measurement are integrated into the head
An optical system that measures a wide wavelength range from UV to NIR
Non-contact, non-destructive high-speed micro measurement within 1 second per point
Safety mechanism guaranteed by the area sensor
A wizard function provided for beginners which enables optical constant analysis
Even complex optical constants can be analyzed using Multipoint analysis method
A macro function included that allows you to set the measurement sequence
A 300mm size stage can be equipped
It is customizable
Models
| Wavelength range | Automatic XY stage type | Fixed frame type | Built-in head type |
| 230 ~ 800nm | OPTM-A1 | OPTM-F1 | OPTM-H1 |
| 360 ~ 1,100nm | OPTM-A2 | OPTM-F2 | OPTM-H2 |
| 900 ~ 1,600nm | OPTM-A3 | OPTM-F3 | OPTM-H3 |
| Specifications | Stroke | Repeatability | Stroke resolution |
| Automatic XY stage type | X: 200mm, Y: 225mm | 2μm | 1μm |
Specification selections(choose one for each item)
| Wavelength range | Film thickness meas. range | Detector | Light source |
| 230 ~ 800nm | 1nm ~ 35μm | CCD | deuterium + halogen |
| 360 ~ 1,100nm | 7nm ~ 49μm | CCD | deuterium + halogen |
| 900 ~ 1,600nm | 16nm ~ 92μm | InGaAs | halogen |
| Type | Magnification | Measurement spot diameter | Viewing field |
| Reflective objective type | 2x lens | ∅ 100μm | ∅ 4,000μm |
| 10x lens | ∅ 20μm | ∅ 800μm | |
| 20x lens | ∅ 10μm | ∅ 400μm | |
| 40x lens | ∅ 5μm | ∅ 200μm | |
| Visible refractive type | 5x lens | ∅ 40μm | ∅ 1,600μm |
Reflectance(absolute, relative)
Thickness(from Å to ㎛)
Optical constant(n, k)
Measurable samples
Evaporated film for semiconductor/display fabrication
Coated film on PET or flexible substrate
Laminate film of transparent materials
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