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SEMICONDUCTOR EVALUATION

Semiconductor
evaluation

Wafer process

Si wafer thickness monitoring system 

SF-3 series

Wafer mapping systems 

SF-3Rθ, SF-3AA, SF-300AAF 

Load port compatible film thickness measurement

GS-300

Metrology

Microspectrophotometer

OPTM(UV SR) series

Spectro ellipsometer

FE-5000 series

Metrology

Thin Film Evaluation TFE-300
  • An optical system which realizes measurement with a wide wavelength range (UV to NIR)

  • Multi stacked layer structure analysis (above 3 layer)

  • Customizations of H/W, S/W, and Communication functions

  • Max 12” foup-based load/unload

  • Pattern recognition for multi-layer on pattern wafer

Microscopic spectro-photometer OPTM(UV SR) series
  • An optical system measuring with a wide wavelength range from UV to NIR
  • Able to measure under non-contact, non-destructive condition with high speed microscopic less than one second
  • Measures the absolute reflectance of sample to obtain accurate film thickness and optical constant(n, k)
Spectro ellipsometer FE-5000 series
  • Ellipsometry measurement for both visible and ultraviolet-ray range(250 ~ 800nm)
  • Applied with automatic angle adjusting mechanism
  • High operability with optical constant database and recipe registration function

Wafer process

Si wafer thickness monitoring system SF-3 series

  • Real-time measurement of Si wafer thickness at CMP or backside grinding

  • Non-contact and non-destructive measurement available

  • Original analytical algorithm for thickness measurement (patent granted)

Wafer mapping systems SF-3Rθ, SF-3AA, SF-300AAF

  • Real-time measurement of Si wafer thickness

  • 3 types of optional stage - Rθ, XY, RθXY

  • High precision and high speed measurement

Load port compatible wafer geometry metrology GS-300

  • Compatible with a spare unit of 300mm EFEM port

  • Pattern alignment of wiring patterns embedded in wafers
  • Responds to high throughput requirements of semiconductor process

6F, 41, Seongnam-daero 925beon-gil, Bundang-gu, Seongnam-si, Gyeonggi-do, 13496, Republic of Korea


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