RS

RS


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RS Sheet resistance

Sheet resistance


#contact RS, non-contact RS, backside ITO, metal

 Features  
  • Measurement range: 10^-4 ~ 10^7Ω(normal), 10^3 ~ 10^14Ω(high)

  • Measurement mode:contact / non-contact

  • Reproducibility: CV < 1.5%

 Measurement 
Measurement items

Ω, Ω/□, Ω•cm, S/cm


Measured data

> Non-contact measurement



> Low resistance measurement



> High resistance measurement

 Applications 
  • Conductive materials e.g. paint, ink, paste plastic, Si wafer, etc.

  • Conductive films e.g. ITO glass, evaporated metal, sprayed metal, ceramics, etc.

  • High resistance materials for LTPS fabrication e.g. a-Si, poly Si, etc.