Sheet resistance

Sheet resistance

Products > Display evaluation > TFT(oxide/LTPS) > RS


The increase in demand for touch screen portable devices such as smartphones and tablets is increasing the importance of sheet resistance measurement. RS measures the electrical properties of materials e.g. conductivity and its strength. It is possible to measure the sheet resistance of ITO, conductive film, and wafer, which has recently been spotlighted as new material and offers various measurement methods according to the material e.g. non-contact measurement.

  • Measurement range: 10^-4 ~ 10^7Ω(normal), 10^3 ~ 10^14Ω(high)

  • Measurement mode:contact / non-contact

  • Reproducibility: CV < 1.5%

Measurement items

Ω, Ω/□, Ω•cm, S/cm

Measured data

> Non-contact measurement

> Low resistance measurement

> High resistance measurement

  • Conductive materials e.g. paint, ink, paste plastic, Si wafer, etc.

  • Conductive films e.g. ITO glass, evaporated metal, sprayed metal, ceramics, etc.

  • High resistance materials for LTPS fabrication e.g. a-Si, poly Si, etc.