Film thickness line scanner(offline type) inspects in-plane film thickness unevenness using hyperspectral imaging for R&D or sampling inspection.
Once the line scanning sensor passes through above the film collecting spectrum data, it provides thickness information of the film. The entire surface of the film can be measured with high speed and high accuracy.
Inspects thickness unevenness of film and other materials
|Measurement item||film thickness(FFT)|
|Position resolution||1mm or less|
|Measurement size||width: up to 250mm, length: no limitation|
|Wavelength range||400 ~ 920nm|
|Pixel per wavelength||approx. 0.6nm|
|Thickness measurement range||2 ~ 250μm|
|Measurement interval||10msec ~|
|Size and weight||454(W) x 609(D) x 927(H)mm, approx. 60kg|
> PET film thickness
PET film has birefringence when enlonged, and the reflection spectrum is as shown in the figure. Our own processing method suppresses the effect of birefringence and enables highly accurate measurement.
> 250mm width film thickness