Film evaluation

Film evaluation

Film total thickness

Si wafer thickness monitoring system SF-3 series
  • Real-time measurement of Si wafer thickness at CMP or backside grinding

  • Non-contact and non-destructive measurement available

  • Original analytical algorithm for thickness measurement - patented*



Coating thickness

Array spectrometer MCPD series
  • Multipurpose spectrometer covering from UV to NIR wavelength range

  • Able to measure micro spot spectrum, light source, transmittance, reflectance, object color and thickness

  • Compact size and light weight - 60% of downsizing from previous generation



Retardation

LCD cell gap measurement RETS series
  • Polarization optical system and array spectrometer
  • Cell gap measurement for LCD cell and empty cell with color filter
  • Measures various size of samples(from 1mm optical element to 10th generation large LCD panels)

Retardation film and material evaluation system RETS 100
  • Evaluates polarization characteristics of optical film
  • Accurate retardation measurement at designated wavelength
  • Measures retardation and axis of each layer for multi-layered sample with non-destructive testing

High speed retardation measurement RE-200
  • Suitable for low retardation measurement

  • High speed measurement of retardation simultaneously with optical axis detection - the world's fastest equivalent

  • Lineup includes various wavelengths in addition to 550nm



Transmittance

Array spectrometer MCPD series
  • Multipurpose spectrometer covering from UV to NIR wavelength range

  • Able to measure micro spot spectrum, light source, transmittance, reflectance, object color and thickness

  • Compact size and light weight - 60% of downsizing from previous generation



Film total thickness

Si wafer thickness monitoring system 

SF-3 series


Coating thickness

Array spectrometer

MCPD series


Retardation

LCD cell gap measurement

RETS series

Retardation film and material evaluation system RETS 100

High speed retardation measurement RE-200


Transmittance

Array spectrometer

MCPD series