Three-Dimensional Optical Wave Field Microscope MINUK

• Evaluating transparent foreign substances and defects in the nano-order．

• Obtaining instant depth direction information in single shot.

• High-speed measurement without focus.

• Non-destructive, non-contact and non-invasive measurement.  

• Easy to find the required location by scanning rough position around the target at high-speed, without focus.

Film total thickness

Film thickness line scanner(in-line type)

• Inspects thickness unevenness of film using hyperspectral imaging without any drop out

• Originally designed hardware(hyperspectral camera) and software

• High precision measurement(patented)

• Wide sample inspection at one time

Film thickness line scanner(offline type)

• Inspects thickness unevenness of film and other materials using hyperspectral imaging

• Originally designed hardware(hyperspectral camera) and software

• High precision measurement(patented)

Array spectrometer MCPD series

• Multipurpose spectrometer covering from UV to NIR wavelength range

• Able to measure micro spot spectrum, light source, transmittance, reflectance, object color and thickness

• Compact size and light weight - 60% of downsizing from previous generation

LCD cell gap measurement RETS series

• Polarization optical system and array spectrometer
• Cell gap measurement for LCD cell and empty cell with color filter
• Measures various size of samples(from 1mm optical element to 10th generation large LCD panels)

Retardation measurement system RETS-100nx

• Measures laminated films by a non-destructive method
• Measures exceptionally high retardation as 60,000nm with high speed and high precision
• The axial correction function improves accuracy even for repeated sample replacement

High speed retardation measurement RE-200

• Suitable for low retardation measurement

• High speed measurement of retardation simultaneously with optical axis detection - the world's fastest equivalent

• Lineup includes various wavelengths in addition to 550nm

Array spectrometer MCPD series

• Multipurpose spectrometer covering from UV to NIR wavelength range

• Able to measure micro spot spectrum, light source, transmittance, reflectance, object color and thickness

• Compact size and light weight - 60% of downsizing from previous generation