OPTM series

OPTM series

Products > Display evaluation > TFT(oxide/LTPS) > OPTM(UV SR) series

Products > Semiconductor evaluation > Metrology > OPTM(UV SR) series

OPTM(UV SR) series Microspectrophotometer

OPTM enables accurate and precise reflectance measurement of ultra-thin films in UV region.


#UV reflectometer, thickness, micro spot, multi-layer, CVD, photo, dry etch, oxide material, film, TSP, roll to roll, material, measurement, optical constant(n, k) measurement, accurate, fast, semiconductor, display

 Features  
  • An optical system measuring with a wide wavelength range from UV to NIR

  • Non-contact, non-destructive, high speed microscopic measurement available less than one second

  • Measures the absolute reflectance of sample to obtain accurate film thickness and optical constant(n, k)

 Specifications 

Models

Wavelength rangeAutomatic XY stage typeFixed frame typeBuilt-in head type
230 ~ 800nmOPTM-A1OPTM-F1
OPTM-H1
360 ~ 1,100nmOPTM-A2
OPTM-F2
OPTM-H2
900 ~ 1,600nmOPTM-A3
OPTM-F3
OPTM-H3


SpecificationsStrokeRepeatabilityStroke resolution
Automatic XY stage typeX: 200mm, Y: 225mm2μm1μm



Specification selections(choose one for each item)

Wavelength rangeFilm thickness meas. rangeDetectorLight source
230 ~ 800nm
1nm ~ 35μmCCDdeuterium + halogen
360 ~ 1,100nm
7nm ~ 49μmCCDdeuterium + halogen
900 ~ 1,600nm
16nm ~ 92μmInGaAshalogen


TypeMagnificationMeasurement spot diameterViewing field
Reflective objective type2x lens∅ 100μm∅ 4,000μm
10x lens∅ 20μm∅ 800μm
20x lens∅ 10μm∅ 400μm
40x lens∅ 5μm∅ 200μm
Visible refractive type5x lens∅ 40μm∅ 1,600μm


 Measurement 
Measurement items
  • Reflectance(absolute, relative)

  • Thickness(from Å to ㎛)

  • Optical constant(n, k)


Measurable samples

  • Evaporated film for semiconductor/display fabrication

  • Coated film on PET or flexible substrate

  • Laminate film of transparent materials