OLED(RGB, white), LED(micro, mini)

Color filter spectral inspection system LCF

• Evaluates FPD manufacturing process including optical property analysis and thin film analysis
• Measurement of transmission spectrum, color, concentration, film thickness and reflection spectrum
• Fully automated tests by recipe registration

LCD cell gap measurement RETS series

• Polarization optical system and array spectrometer
• Cell gap measurement for LCD cell and empty cell with color filter
• Measures various size of samples(from 1mm optical element to 10th generation large LCD panels)

Retardation measurement system RETS-100nx

• Measures laminated films by a non-destructive method
• Measures exceptionally high retardation as 60,000nm with high speed and high precision
• The axial correction function improves accuracy even for repeated sample replacement

Microscopic spectro-photometer OPTM(UV SR) series

• An optical system measuring with a wide wavelength range from UV to NIR
• Able to measure under non-contact, non-destructive condition with high speed microscopic less than one second
• Measures the absolute reflectance of sample to obtain accurate film thickness and optical constant(n, k)

Spectro ellipsometer FE-5000 series

• Ellipsometry measurement for both visible and ultraviolet-ray range(250 ~ 800nm)
• Applied with automatic angle adjusting mechanism
• High operability with optical constant database and recipe registration function

Sheet resistance RS

• Sheet resistance
• Both contact and non-contact measurement mode are possible
• CV < 1.5% of reproducibility