(SM-101 Series)
Products > Film evaluation > Smart Thickness Meter > Smart Thickness Meter SM-101 Series
Portable high precision thickness meter
Want measure it “right now” but it couldn’t
Different result for each person
Unreliable measurement accuracy
Don’t you have the experience like these when thickness measurement?
• Smart thickness meter solves your problems with the following characteristics.
Handy - portable at any production site
• Easy- anybody useable
• Accuracy- small but high precision
• Nondestructive- measurement even for shaped sample
「Portable- handy」 1.1kg, lightweight and easy to carry
「 Simple operation, precise measurement」 Min. 0.1㎛ measurable
「Nondestructive · Noncontact measurement」 without sample damage
「Variety of Utilities」Various materials can be measured such as glass and plastics
１. Handy-portable at any production site
Advantage : Carry it at anywhere!
Reason : Miniature spectrometer, battery driven type employed
Scene１： Outside of the company
Scene２：On the production line
Scene３：On the heavy industry line
2. Accuracy- small but high precision
Advantage : 0.1㎛ thickness measurable!
Reason : Spectroscopic Interference principle applied
3. Various sizes and shapes samples can be measured
Advantage :
① Large size sample available
② Non-destructive methods
③ Various shapes measurable
Reason : Various probe types selectable depend on sample types or shapes
No problem even if the sample size is
bigger than desk
4. Nondestructive- measurement even for shaped sample
Advantage :
① Various shape samples available
② Large size sample
③ Non-destructive methods
Reason : Probe selectable as of the sample characteristics
Probe ①：Basic probe
Use for flat shape sample
Ex.） film, simple shape
Probe ②：Pen-shape probe Option
Use for Narrow or curvy sample
Ex.）Samples with narrow or uneven measurement areas
Probe ③：Non-contact stage Option
Use for a sample shouldn’t be contact necessary
Ex.）liquid form (PR, etc.), semiconductor wafers
| Principle of measurement | Reflective spectroscopy (optical interference), non-destructive measurement |
| Range of measurement | 1~50μm(display range : 0.8~60μm) |
| Repeatability | 2.1σ≦0.01μｍ（SiO2: １μｍ） |
| Measurement time | Less than 1sec |
| Layer | 1 layer |
| Spot size | Less than Φ1ｍｍ |
| Weight | About 1.1kg |
| Size | About 138(W)×198(D)×61(H)mm ※protrusion included |
| Power | Voltage ： AC100-240V |
| Frequency： 50/60Hz | |
| Power consumption ： 35VA | |
| IP/IK code | IP30 / IK06 |
6F, 41, Seongnam-daero 925beon-gil, Bundang-gu, Seongnam-si, Gyeonggi-do, 13496, Republic of Korea
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