Smart Thickness Meter

       (SM-101 Series)

Film thickness line scanner(in-line type)

Products > Film evaluation > Smart Thickness Meter > Smart Thickness Meter SM-101 Series



Portable high precision thickness meter

Want measure it “right now”  but it couldn’t

Different result for each person

Unreliable measurement accuracy

Don’t you have the experience like these when thickness measurement?


• Smart thickness meter solves your problems with the following  characteristics.
Handy - portable at any production site

• Easy- anybody useable

• Accuracy- small but high precision

• Nondestructive- measurement even for shaped sample

 Features  
  • ใ€ŒPortable- handyใ€ 1.1kg, lightweight and easy to carry

  • ใ€Œ Simple operation, precise measurementใ€ Min. 0.1ใŽ› measurable

  • ใ€ŒNondestructive · Noncontact measurementใ€ without sample damage

  • ใ€ŒVariety of Utilitiesใ€Various materials can be measured such as glass and plastics  

๏ผ‘. Handy-portable at any production site 


 Advantage  : Carry it at anywhere!

 Reason : Miniature spectrometer, battery driven type employed

Scene๏ผ‘๏ผš Outside of the company

Scene๏ผ’๏ผšOn the production line

Scene๏ผ“๏ผšOn the heavy industry line

 2. Accuracy- small but high precision 


 Advantage  : 0.1ใŽ› thickness measurable!

Reason : Spectroscopic Interference principle applied

 3. Various sizes and shapes samples can be measured


 Advantage  : 

โ‘  Large size sample available

 โ‘ก Non-destructive methods

 โ‘ข Various shapes measurable


 Reason  Various probe types selectable depend on sample types or shapes


No problem even if the sample size is

bigger than desk


  • No cut necessary
  • No pressure necessary

 4. Nondestructive- measurement even for shaped sample 


 Advantage  : 

 โ‘  Various shape samples available

 โ‘ก Large size sample

 โ‘ข Non-destructive methods


 Reason  Probe selectable as of the sample characteristics


Probe โ‘ ๏ผšBasic probe

Use for flat shape sample

Ex.๏ผ‰ film, simple shape

Probe โ‘ก๏ผšPen-shape probe        Option  

Use for Narrow or curvy sample

Ex.๏ผ‰Samples with narrow or  uneven  measurement areas

Probe โ‘ข๏ผšNon-contact stage        Option 

Use for a sample shouldn’t be contact necessary

Ex.๏ผ‰liquid form (PR, etc.), semiconductor wafers

 Specifications 
Principle of measurement

Reflective spectroscopy

(optical interference),

non-destructive measurement
Range of measurement1~50μm(display range : 0.8~60μm)
Repeatability2.1σโ‰ฆ0.01μ๏ฝ๏ผˆSiO2: ๏ผ‘μ๏ฝ๏ผ‰
Measurement timeLess than 1sec
Layer1 layer
 Spot sizeLess than Φ1๏ฝ๏ฝ
WeightAbout 1.1kg
SizeAbout 138(W)×198(D)×61(H)mm

โ€ปprotrusion included
PowerVoltage ๏ผš AC100-240V
Frequency๏ผš 50/60Hz
Power consumption ๏ผš 35VA
IP/IK code

IP30 / IK06

6F, 41, Seongnam-daero 925beon-gil, Bundang-gu, Seongnam-si, Gyeonggi-do, 13496, Republic of Korea


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