Products > Film evaluation > Film surface Inspection > MINUK
MINUK is capable of evaluating transparent foreign substances and defects in the nano-order, obtaining height direction information in a single shot, and making non-destructive, non-contact and non-invasive measurements.
MINUK also allows the rough position around the target to be scanned at high speed, without focusing, to find the required location.
Evaluating transparent foreign substances and defects in the nano-order．
Obtaining instant depth direction information in single shot.
High-speed measurement without focus.
Non-destructive, non-contact and non-invasive measurement.
Easy to find the required location by scanning rough position around the
target at high-speed, without focus.
| Resolution x,y | 691 nm(one shot),488 nm(composition) |
| Field of view x,y | 700×700 μm |
| Resolution z | 10 nm（Retardation） |
| Digital refocusing range z | ±700 μm |
| Sample size | 100×80×t20 mm (when versatile sample holder attached） |
| Sample stage | Automatic XY stage for fine adjustment X:±10 mm Y：±10 mm Stage for rough adjustment X：129 mm Y：85 mm |
| Laser | Wavelength 638 nm Output 0.39 mW or less, Class1 (Irradiation strength to the sample) |
| Demention (Width×Depth×Height) mm | Main unit:505（W）×630（D）×439（H） |
| Weight | 41 kg |
| Power consumption | Main unit:290 VA *PC and Accessory not included. |
Visualization and quantification of transparent film surfaces invisible to the naked eye
• The nm-order shape information can be obtained in a non-contact, non-destructive and non-invasive manner. Acquiring depth-direction information in a single shot allows to visualize and quantify scratches on the surface of transparent films and the cross-sectional shape of defects that are invisible to the naked eye.
Observing filler inside transparent film
• Fillers inside transparent films can be observed in a single shot, which are invisible to the naked eye. Also, by changing the focus in the depth direction after measurement allows to identify the filler at each depth.
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